JPH0437111Y2 - - Google Patents
Info
- Publication number
- JPH0437111Y2 JPH0437111Y2 JP13726986U JP13726986U JPH0437111Y2 JP H0437111 Y2 JPH0437111 Y2 JP H0437111Y2 JP 13726986 U JP13726986 U JP 13726986U JP 13726986 U JP13726986 U JP 13726986U JP H0437111 Y2 JPH0437111 Y2 JP H0437111Y2
- Authority
- JP
- Japan
- Prior art keywords
- main body
- lid
- valve
- port
- piston
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009423 ventilation Methods 0.000 claims description 24
- 238000004891 communication Methods 0.000 claims description 13
- 238000009825 accumulation Methods 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 29
- 239000013618 particulate matter Substances 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 238000007689 inspection Methods 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13726986U JPH0437111Y2 (en]) | 1986-09-09 | 1986-09-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13726986U JPH0437111Y2 (en]) | 1986-09-09 | 1986-09-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6342594U JPS6342594U (en]) | 1988-03-22 |
JPH0437111Y2 true JPH0437111Y2 (en]) | 1992-09-01 |
Family
ID=31041167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13726986U Expired JPH0437111Y2 (en]) | 1986-09-09 | 1986-09-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0437111Y2 (en]) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5761455B2 (ja) * | 2012-05-09 | 2015-08-12 | 株式会社村田製作所 | 冷却装置、加熱冷却装置 |
JP7228860B1 (ja) | 2022-02-07 | 2023-02-27 | 国立大学法人北海道大学 | 分光計測器 |
JP7189585B1 (ja) | 2022-02-07 | 2022-12-14 | 国立大学法人北海道大学 | 情報処理システムおよび分光計測器 |
-
1986
- 1986-09-09 JP JP13726986U patent/JPH0437111Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6342594U (en]) | 1988-03-22 |
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